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Document type:
Konferenzbeitrag 
Author(s):
Meier, S.; Rinck, H.; Lange, B.; Muellner, E.; Brederlow, R.; Enzelberger-Heim, M.; Summerfelt, S.; Kreupl, F.; Wolf, B. 
Title:
Patterning Platinum by Selective Wet Etching of Sacrificial Pt-A1 Alloy 
Book / Congress title:
2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) 
Publisher:
IEEE 
Date of publication:
01.04.2020 
Year:
2020 
Print-ISBN:
9781728125398