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Document type:
Zeitschriftenaufsatz
Author(s):
Imtaar, M.A.; Yadav, A.; Epping, A.; Becherer, M.; Fabel, B.; Rezgani, J.; Csaba, G.; Bernstein, G.H.; Scarpa, G.; Porod, W.; Lugli, P.
Title:
Nanomagnet Fabrication Using Nanoimprint Lithography and Electrodeposition
Abstract:
We present a novel fabrication process for the growth of metal nanostructures that combines nanoimprint lithography and electrodeposition, both of which are suitable for large-scale industrial fabrication. Gold nanostructures fabricated by nanoimprint lithography on a highly doped, p-type, Si wafer act as a seed layer for metal electrodeposition. This novel process has wide applications in nanomagnet logic and surface-enhanced electrochemistry. We fabricate magnetic nanowires and nanodots usin...     »
Journal title:
Nanotechnology, IEEE Transactions on (Volume:12 , Issue: 4 ) 2013-07
Year:
2013
Year / month:
2013-07
Quarter:
3. Quartal
Month:
Jul
Pages contribution:
547 - 552
Fulltext / DOI:
doi:10.1109/TNANO.2013.2257833
WWW:
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6497530
Publisher:
IEEE Xplore Digital Library
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