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Document type:
Zeitschriftenaufsatz 
Author(s):
Furio, A; Stelzer, M; Jung, M; Neitzert, H C; Kreupl, F 
Title:
Graphenic carbon as etching mask: patterning with laser lithography and KOH etching 
Journal title:
Journal of Physics: Conference Series 
Year:
2019 
Journal volume:
1226 
Pages contribution:
012011 
Publisher:
IOP Publishing 
E-ISSN:
1742-65881742-6596 
Date of publication:
01.05.2019