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Author(s):
Speckbacher M., Osmann E., Gibbs J., Tornow M., 
Title:
Directed Self-assembly of Silicon Nanocubes Fabricated by Nano Imprint-Lithography 
Abstract:
The fabrication, electrical characterization and self-assembly of silicon nanocubes (SiNCs) is reported. Arrays of highly doped SiNCs featuring edge lengths of 110 nm are fabricated in large yields on silicon-on-insulator substrates using nano imprint-lithography as well as wet chemical and dry etching techniques. Interdigitated electrode arrays serve as a platform for the electrical characterization of single SiNCs. Self-assembly of SiNC agglomerates in solution is realized by cube surface func...    »
 
Keywords:
Directed Self-assembly of Silicon Nanocubes 
Published as:
Conference Paper, DOI: 10.1109/NANO.2018.8626349 
Month:
Jul 
Year:
2018 
Notes:
2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO) 
TUM-Einrichtung:
Professur für Molekularelektronik