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Document type:
Patentanmeldung 
Patent application number:
US 2012305873 (A1) 
Inventor:
Gutsche; Martin; Kreupl; Franz ; Seidl; Harald 
Assignee:
Gutsche; Martin; Kreupl; Franz ; Seidl; Harald 
Title:
VERTICAL INTERCONNECT STRUCTURE, MEMORY DEVICE AND ASSOCIATED PRODUCTION METHOD 
Patent office:
US 
Publication date application:
06.12.2012 
Year:
2012 
Language:
en 
Covered by:
Scopus 
TUM Institution:
Hybride Elektronische Systeme 
Format:
Text