In situ direct visualization of irradiated electron-beam patterns on unprocessed resists using atomic force microscopy

Document type:: Zeitschriftenaufsatz
Author(s):: Koop, H., Schnurbusch, D., Müller, M., Gründl, T., Zech, M., Amann, M. C., Karrai, K., Holleitner, A.
Title:: In situ direct visualization of irradiated electron-beam patterns on unprocessed resists using atomic force microscopy
Journal title:: Journal of Vacuum Science and Technology
Year:: 2010
Year / month:: 2010-07
Quarter:: 3. Quartal
Month:: Jul
Journal issue:: 28/4
Reviewed:: ja
Language:: en
Fulltext / DOI:: doi:10.1116/1.3457938
WWW:: http://avspublications.org/jvstb/resource/1/jvtbd9/v28/i4/p802_s1
Print-ISSN:: 1071-1023
Status:: published (reviewed)
Semester:: SS 02
TUM Institution:: Lehrstuhl für Halbleitertechnologie (E26)
Format:: Text
BibTeX