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- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Koerdel, M.; Alatas, F.; Schick, A.; Rupitsch, S.J.; Lerch, R.
- Title:
- Impact of sensor design on the contactless inspection of planar electronic devices by capacitive coupling
- Journal title:
- Procedia Engineering
- Year:
- 2011
- Journal volume:
- vol. 25
- Pages contribution:
- pp. 415-418
- Reviewed:
- ja
- Language:
- en
- Fulltext / DOI:
- doi:dx.doi.org/10.1016/j.proeng.2011.12.103
- Status:
- Verlagsversion / published
- Semester:
- WS 11-12
- Format:
- Text
BibTeX