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Document type:
Zeitschriftenaufsatz 
Author(s):
Gong, J.; Paul, N.; Nagy, B.; Dolgos, M.; Bottyán, L.; {M̈uller-Buschbaum}, P.; B̈oni, P.; Zheng, J.-G.; Paul, A. 
Title:
Morphology of {{Fe}} Nanolayers with {{Pt}} Overlayers on Low-Temperature Annealing 
Abstract:
Agglomeration or dewetting is technologically important in the microelectronics industry as it is one of the methods of producing arrays of nanosized metal clusters. This report investigates the grain morphology evolution due to low-temperature annealing (473 K) in Fe layers with Pt overlayers. X-ray diffuse scattering and grazing-incidence small-angle X-ray scattering (GISAXS) have been used to access different correlation lengths and correlate them with grain sizes from transmission electron m...    »
 
Journal title:
Journal of Applied Crystallography 
Year:
2016 
Journal volume:
49 
Month:
oct 
Journal issue:
Pages contribution:
1682 
Language:
en 
Print-ISSN:
1600-5767