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Document type:
Zeitschriftenaufsatz 
Author(s):
Lehnert, T.; Tixier, S.; B̈oni, P.; Gotthardt, R. 
Title:
A New Fabrication Process for {{Ni}}\textendash{{Ti}} Shape Memory Thin Films 
Abstract:
A new fabrication method for Ni\textendash{}Ti thin films showing martensitic phase transformation is presented. A multilayer of up to 100 alternating pure Ni and pure Ti layers is deposited in an automated DC magnetron sputter system optimized for homogeneous deposition on large substrates. The single layer thickness is in the range of 10 \textendash{} 20 nm. The multilayer is subjected to different heat treatments in order to allow for interdiffusion of Ni and Ti and subsequent recrystallizati...    »
 
Journal title:
Materials Science and Engineering: A 
Year:
1999 
Journal volume:
273-275 
Month:
dec 
Pages contribution:
713 
Language:
en 
Print-ISSN:
09215093