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Titel:

Thin Films for Neutron Optics

Dokumenttyp:
Konferenzbeitrag
Autor(en):
Elsenhans, O.; Boeni, P.; Friedli, H. P.; Grimmer, H.; Buffat, P. A.; Leifer, K.; Anderson, I. S.
Abstract:
Thin film multilayers play a crucial role in the efficient transport of neutrons from the source to the experiments at the Swiss Neutron Spallation source SINQ. In order to develop and optimize the neutron optical components, a magnetron sputtering facility has been installed at PSI aimed at the deposition of thin films covering large substrate area. Initial uniformity tests are very encouraging showing thickness variation of only 1% for 5 nm layers over an area of 500 X 400 mm\textsuperscript{2...     »
Kongress- / Buchtitel:
Neutron {{Optical Devices}} and {{Applications}}
Band / Teilband / Volume:
1738
Verlag / Institution:
International Society for Optics and Photonics
Jahr:
1992
Monat:
nov
Seiten:
130
Volltext / DOI:
doi:10.1117/12.130624
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