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Document type:
Konferenzbeitrag 
Author(s):
Haeberle, T.; Loghin, F.; Zschieschang, U.; Klauk, H.; Lugli, P. 
Title:
Carbon nanotube thin-film transistors featuring transfer-printed metal electrodes and a thin, self-grown aluminum oxide gate dielectric 
Abstract:
We report on a novel fabrication scheme to define metal source and drain contacts for short-channel thin-film transistors utilizing a purely additive transfer-printing process. We demonstrate the viability of this approach by realizing carbon nanotube thin-film transistors featuring a very thin aluminum oxide gate dielectric The active layer of the transistors is spray-deposited from an aqueous carbon-nanotube suspension with 90% semiconducting content. Full gate control is demonstrated for gate...    »
 
Keywords:
III-V semiconductors, aluminium compounds, carbon nanotube field effect transistors, electrodes, nanofabrication, thin film transistors, three-dimensional printing, AlN, additive transfer-printing process, aqueous carbon-nanotube suspension, carbon nanotube thin-film transistors, drain contacts, fabrication scheme, full gate control, metal source, short-channel thin-film transistors, thin self-grown aluminum oxide gate dielectric, transfer-printed metal electrodes, Dielectrics, Logic gates, Meta...    »
 
Book / Congress title:
Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on 
Congress (additional information):
Rome, Italy, 27-30 July 2015 2015-07 
Publisher:
IEEE Xplore Digital Library 
Year:
2015 
Quarter:
3. Quartal 
Year / month:
2015-07 
Month:
Jul 
Pages:
160--163 
Language:
en