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Document type:
Konferenzbeitrag 
Author(s):
Cyril, B. K.; Schwesinger, N. 
Title:
Design and Fabrication of Individualized Capacitive Microsensor for Tilt Measurement 
Book / Congress title:
2015 IEEE Sensors 
Date of congress:
1-4. November 2015 
Year:
2015 
Pages:
1669-1672