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- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Zaki, M.; Zähringer, S.; Schwesinger, N.
- Title:
- Simulation of thick film PZT actuators with interdigitated electrodes
- Pages contribution:
- 38/1-8
- Book / Congress title:
- Smart Sensors, Actuators, and MEMS VI
- Volume:
- Proc. SPIE 8763
- Organization:
- SPIE
- Congress city:
- Grenoble
- Publisher:
- SPIE
- Year:
- 2013
- Month:
- Apr
- Pages:
- 8
- Reviewed:
- ja
- Language:
- en
- Publication format:
- WWW
- Fulltext / DOI:
- doi:10.1117/12.2017411
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