User: Guest  Login
Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Zähringer, S.; Widmann, E.; Schwesinger, N. 
Title:
Surface Micro Machined Actuators on Piezoelectric Bulk Material 
Book / Congress title:
International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2011) 
Organization:
IMAPS/ACer 
Year:
2011 
Month:
Apr 
Reviewed:
ja 
Language:
en