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- Title:
Surface Micro Machined Actuators on Piezoelectric Bulk Material
- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Zähringer, S.; Widmann, E.; Schwesinger, N.
- Book / Congress title:
- International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2011)
- Organization:
- IMAPS/ACer
- Year:
- 2011
- Month:
- Apr
- Reviewed:
- ja
- Language:
- en
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