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Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Saller, K.; Riedl, H.; Lugli, P.; Koblmüller, G.; Tornow, M.
Titel:
One-step transfer printing of patterned nanogap electrodes
Abstract:
Direct printing of nanogap-separated metallic contact pairs is described that enables novel nanoelectronic device architectures. Nanotransfer printing (nTP) stamps are grown by molecular beam epitaxy involving layered III-V semiconductors that are selectively etched. Finished stamps comprise both the nanoscale surface trench that becomes the nanogap on printing and a microscale, predetermined geometry that affords the simultaneous integration of contact pads for external electrical testing. This...     »
Zeitschriftentitel:
Journal of Vacuum Science & Technology B 37, 040602 (2019) 2019-06
Jahr:
2019
Jahr / Monat:
2019-06
Quartal:
2. Quartal
Monat:
Jun
Seitenangaben Beitrag:
1-6
Sprache:
en
Volltext / DOI:
doi:10.1116/1.5100560
WWW:
https://avs.scitation.org/doi/abs/10.1116/1.5100560
Verlag / Institution:
American Vacuum Society
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