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Document type:
Zeitschriftenaufsatz
Author(s):
Hirth, F.; Buck, T.C.; Pérez Grassi, A.; Koch, A.W.
Title:
Depth-sensitive thin film reflectometer
Journal title:
IOP Measurement Science and Technology, Vol. 21, 125301
Year:
2010
Reviewed:
ja
Language:
en
Semester:
WS 10-11
Format:
Text
 BibTeX