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- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Burgmann, Stephanie; Afif, Abdulla; Lid, Markus Joakim; Baglo, Kjetil; Chaikasetsin, Settasit; van Helvoort, Antonius T.J.; Prinz, Fritz B.; Haugen, Bjørn; Torgersen, Jan
- Title:
- < i> In Situ< /i> ALD-TEM System to Study Atomic Nucleation Phenomena - Enabled by Ultrathin Large Aspect Ratio Free-Standing Shell Structures
- Journal title:
- Key Engineering Materials
- Year:
- 2023
- Journal volume:
- 968
- Pages contribution:
- 31-38
- Covered by:
- Scopus
- Fulltext / DOI:
- doi:10.4028/p-0dlr8p
- Publisher:
- Trans Tech Publications, Ltd.
- E-ISSN:
- 1662-9795
- Date of publication:
- 06.12.2023
- TUM Institution:
- Lehrstuhl für Werkstoffwissenschaften
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