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- Title:
Designing Capacitive Micromachined Ultrasonic Transducer (CMUT) Based Sensors for Low Frequency Airborne Applications
- Document type:
- Konferenzbeitrag
- Author(s):
- Peller, Sebastian; Bierl, Rudolf; Hagelauer, Amelie
- Keywords:
- Q-factor; Ultrasonic transducers; Ultrasonic imaging; Ultrasonic variables measurement; Atmospheric modeling; Resonant frequency; Predictive models; Sensor phenomena and characterization; Capacitance; Resonance; CMUT model; airborne ultrasound; resonance frequency; Q-factor; capacitance; pull-in voltage
- Book / Congress title:
- 2024 IEEE SENSORS
- Year:
- 2024
- Pages:
- 1-4
- Fulltext / DOI:
- doi:10.1109/sensors60989.2024.10785117
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