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- Document type:
- Konferenzbeitrag
- Author(s):
- Hölzl, W.; Behlert, R.; Gehring, M. and Schrag, G.
- Title:
- Enhanced Fluid Flow by Wavelike Excitation of a Micromechanical Bending Actuator
- Book / Congress title:
- 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
- Date of congress:
- 23- 27.06
- Year:
- 2019
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