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- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Manz J.; Dehe A.; Schrag G.
- Title:
- Modeling high signal-to-noise ratio in a novel silicon MEMS microphone with comb readout
- Book / Congress title:
- Proceedings of SPIE Microtechnologies 2017
- Congress (additional information):
- Barcelona, Spain
- Date of congress:
- 8-10 May 2017
- Year:
- 2017
- Year / month:
- 2917-05
- Month:
- Mar
- Language:
- en
- TUM Institution:
- Lehrstuhl für Technische Elektrophysik
- Ingested:
- 23.10.2018
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