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- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Schrag, G.; Kuenzig, T.
- Title:
- Towards High Fidelity Silicon Microphones: Evaluating the Potential of Industrial Microsystems Applying Tailored System-level Models
- Pages contribution:
- 6
- Book / Congress title:
- Proceedings of 18th International Concerence on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
- Congress (additional information):
- Eurosime 2017
- Date of congress:
- April, 2 - 5, 2017
- Year:
- 2017
- Year / month:
- 2017-04
- Month:
- Apr
- Pages:
- 6
- Print-ISBN:
- 978-1-5090-4343-9
- Reviewed:
- ja
- Language:
- en
- Notes:
- IEEE Catalog Number: CFP17566-USB
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