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- Document type:
- Konferenzbeitrag
- Author(s):
- Künzig, T.; Schrag, G.; Dehe, A.; Wachutka, G.
- Title:
- Performance and Noise Analysis of Capacitive Silicon Microphones Using Tailored System-Level Simulation
- Pages contribution:
- 2192-2195
- Book / Congress title:
- Proceedings of the 18th Int. Conf. on Solid State Sensors, Actuators and Microsystems
- Date of congress:
- June 21-25
- Year:
- 2015
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