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- Dokumenttyp:
- Konferenzbeitrag
- Autor(en):
- Behlert, R.: Künzig, T.; Schrag, G.: Wachutka, G.
- Titel:
- Theoretical and Experimental Investigations on Failure Mechanisms Occuring During Long-Term Cycling of Electrostatic Actuators
- Herausgeber:
- IEEE
- Kongress- / Buchtitel:
- 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
- Kongress / Zusatzinformationen:
- EuroSimE 2014
- Datum der Konferenz:
- April, 7-9
- Jahr:
- 2014
- E-ISBN:
- 978-1-4799-4790-4
- Reviewed:
- ja
- Sprache:
- en
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