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- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Niessner, M. ; Schrag, G.; Iannacci, J.; Wachutka, G.
- Title:
- COMSOL API based Toolbox for the Mixed-Level Modeling of Squeeze-Film Damping in MEMS: Simulation and Experimental Validation
- Book / Congress title:
- Proceedings of the 5th Europeans COMSOL Conference
- Congress (additional information):
- COMSOL CONFERENCE 2011, October 26-28, Stuttgart, Germany
- Year:
- 2011
- Reviewed:
- ja
- Language:
- de
- Publication format:
- CD-ROM / DVD
- Format:
- Text
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