@article{1593869,
	author = {Pernpeitner, M. and  Faust, T. and  Hocke, F. and  Kotthaus, J.P. and  Weig, E.M. and  Huebl, H. and  Gross, R.},
	title = {Circuit Electromechanics with a Non-Metallized Nanobeam},

        journal = {Appl. Phys. Lett. 105, 123106 2014-09},
	year = {2014},


        month = {Sep},




        doi = {10.1063/1.4896419},

        language = {en},

        abstract = {We have realized a nano-electromechanical hybrid system consisting of a silicon nitride beam dielectrically coupled to a superconducting microwave resonator. We characterize the sample by making use of the Duffing nonlinearity of the strongly driven beam. In particular, we calibrate the amplitude spectrum of the mechanical motion and determine the electromechanical vacuum coupling. A high quality factor of 480 000 at a resonance frequency of 14 MHz is achieved at 0.5 K. The experimentally determined electromechanical vacuum coupling of 11.5 mHz is quantitatively compared with finite element based model calculations.},


	
        url = {https://aip.scitation.org/doi/full/10.1063/1.4896419},
}