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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
Manz J., Dehe A., Schrag G. 
Title:
Modeling high signal-to-noise ratio in a novel silicon MEMS microphone with comb readout 
Book / Congress title:
Proceedings of SPIE Microtechnologies 2017 
Congress (additional information):
Barcelona, Spain 
Date of congress:
8-10 May 2017 
Year:
2017 
Year / month:
2917-05 
Month:
Mar 
Language:
en 
TUM Institution:
Lehrstuhl für Technische Elektrophysik 
Ingested:
23.10.2018