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Title:

Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors

Document type:
Zeitschriftenaufsatz
Author(s):
Gassner, Simon; Schaller, Rainer; Eberl, Matthias; von Koblinski, Carsten; Essing, Simon; Ghaderi, Mohammadamir; Schmitt, Katrin; Wöllenstein, Jürgen
Journal title:
Sensors
Year:
2022
Journal volume:
22
Journal issue:
2
Pages contribution:
685
Fulltext / DOI:
doi:10.3390/s22020685
Publisher:
MDPI AG
E-ISSN:
1424-8220
Date of publication:
17.01.2022
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