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- Document type:
- Konferenzbeitrag
- Contribution type:
- Vortrag / Präsentation
- Author(s):
- Künzig, T.; Iannacci, J.; Schrag, G.; Wachutka, G.
- Title:
- Study of an active thermal recovery mechanism for an electrostatically actuated RF-MEMS switch
- Book / Congress title:
- Proceedings of the 13th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
- Congress (additional information):
- EuroSime 2012, April, 16-18, Cascais, Portugal
- Publisher:
- IEEE
- Year:
- 2012
- Reviewed:
- ja
- Language:
- en
- Publication format:
- CD-ROM / DVD
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