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Dokumenttyp:
Zeitschriftenaufsatz 
Autor(en):
Seitner, M.J.; Gajo, K.; Weig, E.M. 
Titel:
Damping of metallized bilayer nanomechanical resonators at room temperature 
Abstract:
We investigate the influence of gold thin-films subsequently deposited on a set of initially bare, doubly clamped, high-stress silicon nitride string resonators at room temperature. Analytical expressions for resonance frequency, quality factor and damping for both in- and out-of-plane flexural modes of the bilayer system are presented, which allows for the determination of effective elastic parameters of the composite structure from our experimental data. We find the inverse quality factor to s...    »
 
Zeitschriftentitel:
Appl. Phys. Lett. 105, 213101 2014-11 
Jahr:
2014 
Jahr / Monat:
2014-11 
Quartal:
4. Quartal 
Monat:
Nov 
Sprache:
en 
Volltext / DOI:
Verlag / Institution:
Applied Physics Letters AIP