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Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Franz Kreupl
Title:
Carbon-based Materials as Key-Enabler for “More-than-Moore“ Devices
Abstract:
The talk will assess carbon-based materials like nanotubes and graphene in possible “More-than-Moore” applications. The requirements for the use in future transistor devices and interconnects is reviewed and the discussion is extended to applications which are not ultimately scaled to the smallest size. We show the application of graphenic carbon, which requires a high temperature budget for the deposition, in capacitors, diodes, through-silicon vias, novel non-volatile memories and sensors. The...     »
Keywords:
Plenary Talk
Book / Congress title:
Micro- and Nanoengineering (MNE) 2016
Organization:
MNE
Date of congress:
20.09.2016
Date of publication:
20.09.2016
Year:
2016
Language:
en
TUM Institution:
Hybride Elektronische Systeme
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