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- Document type:
- Konferenzbeitrag
- Author(s):
- Schrag, G.; Reutter, T.; Wachutka, G.
- Title:
- Finite Element Simulations Combined with Statistical Analysis of Variance: Exploring the Potential of Piezoelectric MEMS Microphones
- Pages contribution:
- pp. 1452-1455
- Book / Congress title:
- Proceedings of the 17th International Conference on Solid State Sensors, Actuators and Microsystems
- Congress (additional information):
- TRANSDUCERS 16-20 June, 2013, Barcelona, Spain
- Publisher:
- IEEE
- Year:
- 2013
- Language:
- en
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