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Document type:
Konferenzbeitrag 
Author(s):
Iannacci, J.; Sordo, G.; Gotthardi, M.; Künzig, T.; Schrag, G., Wachutka, G. 
Title:
An Energy Harvester Concept for Electrostatic Conversion Manufactured in MEMS Surface Micromachining Technology 
Book / Congress title:
Proceedings of the International Semiconductor Conference Dresden-Grenoble 
Congress (additional information):
ISCDG 2013, September 26-27, Dresden Germany 
Year:
2013 
Language:
en