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Document type:
Konferenzbeitrag 
Author(s):
Zöpfl, T.; Klare, S.; Wachutka, G.; Schrag, G. 
Title:
Characterisation of the intrinsic stress in micromachined parylene membranes 
Book / Congress title:
Proceedings of SPIE: Smart Sensors, Actuators, and MEMS IV 
Volume:
7362 
Year:
2009