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Document type:
Zeitschriftenaufsatz 
Author(s):
Jegert, G.; Kersch, A.; Weinreich, W.; Schröder, U.; Lugli, P. 
Title:
Modeling of leakage currents in high-k dielectrics: Three-dimensional approach via kinetic Monte Carlo 
Abstract:
Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.3310065 We report on a simulation algorithm, based on kinetic Monte Carlo techniques, that allows us to investigate transport through high-permittivity dielectrics. In the example of TiN/ZrO2/TiN capacitor structures, using best-estimate physical parameters, we have identified the dominant transport mechanisms. Comparison with experimental data revea...    »
 
Journal title:
Applied Physics Letters (Volume:96 , Issue: 6 ) 
Year:
2010 
Year / month:
2010-02 
Quarter:
1. Quartal 
Month:
Feb 
Pages contribution:
062113 -062113-3 
Language:
en 
Publisher:
IEEE Xplore Digital Library 
Format:
Text