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- Document type:
- Konferenzbeitrag
- Author(s):
- Niessner, M. ; Schrag, G. ; Wachutka, G.; Iannacci, J. ; Reutter, T. ; Mulatz, H.
- Title:
- "Non-linear model for the simulation of viscously damped RF-MEMS switches at varying ambient pressure conditions"
- Pages contribution:
- pp. 618-621
- Book / Congress title:
- Proceedings of EUROSENSORS XXIII
- Congress (additional information):
- September 6-9, 2009, Lausanne, Schweiz
- Year:
- 2009
- Language:
- en
- Format:
- Text
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