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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
Scarpa, G., et al. 
Title:
Pattern generation by using mutlistep room-temperature nanoimprint lithographie 
Book / Congress title:
IEEE Nano 2009, Session WE2_3: Terascale Nanoelectronics 
Congress (additional information):
Genoa, Italy, July 26-3, 2009 
Year:
2009 
Quarter:
3. Quartal 
Year / month:
2009-07 
Month:
Jul 
Language:
en 
Format:
Text