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- Document type:
- Konferenzbeitrag
- Author(s):
- Zöpfl, T. ; Klare, S. ; Wachutka, G. ; Schrag, G.
- Title:
- "Characterisation of the intrinsic stress in micromachined parylene membranes"
- Pages contribution:
- pp. 73621M-1-11
- Book / Congress title:
- Proceedings of SPIE: Smart Sensors, Actuators and MEMS IV
- Congress (additional information):
- SPIE 2009, May 4-6 , Dresden, Germany
- Volume:
- Vol. 7362
- Year:
- 2009
- Language:
- en
- Format:
- Text
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