Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube

Document type:: Zeitschriftenaufsatz
Author(s):: Pinzek, Simon; Beckenbach, Thomas; Viermetz, Manuel; Meyer, Pascal; Gustschin, Alex; Andrejewski, Jana; Gustschin, Nikolai; Herzen, Julia; Schulz, Joachim; Pfeiffer, Franz
Title:: Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube
Journal title:: Journal of Micro/Nanopatterning, Materials, and Metrology
Year:: 2021
Journal volume:: 20
Journal issue:: 04
Fulltext / DOI:: doi:10.1117/1.jmm.20.4.043801
Publisher:: SPIE-Intl Soc Optical Eng
E-ISSN:: 2708-8340
Date of publication:: 04.10.2021
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