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Document type:
Zeitschriftenaufsatz 
Author(s):
Pinzek, Simon; Beckenbach, Thomas; Viermetz, Manuel; Meyer, Pascal; Gustschin, Alex; Andrejewski, Jana; Gustschin, Nikolai; Herzen, Julia; Schulz, Joachim; Pfeiffer, Franz 
Title:
Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube 
Journal title:
Journal of Micro/Nanopatterning, Materials, and Metrology 
Year:
2021 
Journal volume:
20 
Journal issue:
04 
Publisher:
SPIE-Intl Soc Optical Eng 
E-ISSN:
2708-8340 
Date of publication:
04.10.2021