Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube

Dokumenttyp:: Zeitschriftenaufsatz
Autor(en):: Pinzek, Simon; Beckenbach, Thomas; Viermetz, Manuel; Meyer, Pascal; Gustschin, Alex; Andrejewski, Jana; Gustschin, Nikolai; Herzen, Julia; Schulz, Joachim; Pfeiffer, Franz
Titel:: Fabrication of x-ray absorption gratings via deep x-ray lithography using a conventional x-ray tube
Zeitschriftentitel:: Journal of Micro/Nanopatterning, Materials, and Metrology
Jahr:: 2021
Band / Volume:: 20
Heft / Issue:: 04
Volltext / DOI:: doi:10.1117/1.jmm.20.4.043801
Verlag / Institution:: SPIE-Intl Soc Optical Eng
E-ISSN:: 2708-8340
Publikationsdatum:: 04.10.2021
BibTeX