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Document type:
Zeitschriftenaufsatz 
Author(s):
Gustschin, Nikolai; Gustschin, Alex; Meyer, Pascal; Viermetz, Manuel; Riederer, Philipp; Herzen, Julia; Mohr, Jürgen; Pfeiffer, Franz 
Title:
Quality and parameter control of X-ray absorption gratings by angular X-ray transmission 
Abstract:
Here we report on a non-destructive, spatially resolving and easy to implement quality and parameter control method for high aspect ratio X-ray absorption gratings. Based on angular X-ray transmission measurements, our proposed technique allows to determine the duty cycle, the transmittance, the height, as well as the local inclination of the absorbing grating structures. A key advantage of the presented method is a fast and extensive grating quality evaluation without the need of implementing a...    »
 
Journal title:
Optics Express 
Year:
2019 
Journal volume:
27 
Journal issue:
11 
Pages contribution:
15943 
Reviewed:
ja 
Language:
en 
Publisher:
The Optical Society 
E-ISSN:
1094-4087 
Accepted:
17.02.2019 
Date of publication:
21.05.2019