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Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Tixier, S.; B̈oni, P.; Van Swygenhoven, H.
Titel:
Hardness Enhancement of Sputtered {{Ni}} 3 {{Al}}/{{Ni}} Multilayers
Abstract:
Ni3Al/Ni multilayers have been grown by magnetron sputtering at room temperature. Structural characterisations were performed by means of X-ray diffraction and re\textasciimacron{}ection. The indentation hardness of the samples as a function of the bilayer thickness has been studied. An increase in hardness up to 88% of the bulk hardness of Ni3Al is observed when bilayer thickness L decreases to Lmax $<$ 100 AÊ . A further decrease in bilayer thickness results in a decrease in hardness. At L . Lmax the hardness variation is found to be compatible with the Hall$\pm$ Petch relation. At L , Lmax, the reduction in hardness is discussed in terms of structure and morphology of the layers. An increase of the mosaic spread of the grains as well as a decrease in density is observed at small L. q 1999 Elsevier Science S.A. All rights reserved.
Zeitschriftentitel:
Thin Solid Films
Jahr:
1999
Band / Volume:
342
Monat:
mar
Heft / Issue:
1-2
Seitenangaben Beitrag:
188
Sprache:
en
Volltext / DOI:
doi:10.1016/S0040-6090(98)01495-3
Print-ISSN:
00406090
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