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Document type:
Zeitschriftenaufsatz 
Author(s):
Weiler, B.; Haeberle, T.; Gagliardi, A.; Lugli, P. 
Title:
Kinetic Monte Carlo of transport processes in Al/AlOx/Au-layers: Impact of defects 
Abstract:
Ultrathin films of alumina were investigated by a compact kMC-model. Experimental jV-curves from Al/AlOx/Au-junctions with plasma- and thermal-grown AlOx were fitted by simulated ones. We found dominant defects at 2.3-2.5 eV below CBM for AlOx with an effective mass m∗ox=mox∗=0.35 m0 and a barrier EB,Al/AlOx≈2.8EB,Al/AlOx≈2.8 eV in agreement with literature. The parameterization is extended to varying defect levels, defect densities, injection barriers, effective masses and the thickness of AlOx...    »
 
Keywords:
Defect levels Tunneling Crystal defects Current density Effective mass 
Journal title:
AIP Advances 6, 095112 (2016) 2016-09 
Year:
2016 
Year / month:
2016-09 
Quarter:
3. Quartal 
Month:
Sep 
Language:
en 
Publisher:
AIP Publishing LLC