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Document type:
Zeitschriftenaufsatz 
Author(s):
Buchholz, K.; Tinazli, A.; Kleefen, A.; Dorfner, D.; Pedone, D.; Rant, U.; Tampé, R.; Abstreiter, G.; Tornow, M. 
Title:
Silicon-on-insulator based nanopore cavity arrays for lipid membrane investigation 
Abstract:
We present the fabrication and characterization of nanopore microcavities for the investigation of transport processes in suspended lipid membranes. The cavities are situated below the surface of silicon-on-insulator (SOI) substrates. Single cavities and large area arrays were prepared using high resolution electron-beam lithography in combination with reactive ion etching (RIE) and wet chemical sacrificial underetching. The locally separated compartments have a circular shape and allow the encl...    »
 
Journal title:
Nanotechnology. 2008 Nov 5; 19(44):445305 2008-10 
Year:
2008 
Year / month:
2008-10 
Quarter:
4. Quartal 
Month:
Oct 
Reviewed:
ja 
Language:
en 
Publisher:
IOP Science Publishing