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Author(s):
Schüttler, M; Meyer, P; Schaff, F; Yaroshenko, A; Kunka, D; Besser, H; Pfeiffer, F; Mohr, J 
Title:
Height control for small periodic structures using x-ray radiography 
Abstract:
We report on a method to characterize the height of periodic x-ray absorbing structures. Such structures are used for example in grating-based x-ray interferometry. In contrast to other techniques, our approach allows for a non-destructive determination of the height based on a few transmission measurements. It can be used with conventional laboratory-based x-ray setups and is therefore of great interest at the application sites of the structures, as it allows further characterization without th...    »
 
Journal title:
Measurement Science and Technology 
Year:
2016 
Journal volume:
27 
Journal issue:
Pages contribution:
025015