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Document type:
Zeitschriftenaufsatz 
Author(s):
Weiler, B.; Nagel, R.; Albes, T.; Haeberle, T.; Gagliardi, A.; Lugli, P. 
Title:
Electrical and Morphological Characterization of Transfer-Printed Au / Ti / TiO x / p + Si Nano- and Microstructures with Plasma-Grown Titanium Oxide Layers 
Abstract:
Highly-ordered, sub-70 nm-MOS-junctions of Au/Ti/TiOx/p+-Si were efficiently and reliably fabricated by nanotransfer-printing (nTP) over large areas and their functionality was investigated with respect to their application as MOS-devices. First, we used a temperature-enhanced nTP process and integrated the plasma-oxidation of a nm-thin titanium film being e-beam evaporated directly on the stamp before the printing step without affecting the p+-Si substrate. Second, morphological investigations...    »
 
Keywords:
Highly-ordered, sub-70 nm-MOS-junctions of Au/Ti/TiOx/p+-Si were efficiently and reliably fabricated by nanotransfer-printing (nTP) over large areas and their functionality was investigated with respect to their application as MOS-devices. First, we used a temperature-enhanced nTP process and integrated the plasma-oxidation of a nm-thin titanium film being e-beam evaporated directly on the stamp before the printing step without affecting the p+-Si substrate. Second, morphological investigations...    »
 
Journal title:
J. Appl. Phys. 119, 145106 (2016) 2016-04 
Year:
2016 
Year / month:
2016-04 
Quarter:
2. Quartal 
Month:
Apr 
Language:
en 
Publisher:
AIP Publishing LLC