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- Author(s):
- Farinelli, Paola; Giacomozzi, Flavio; Mannocchi, Giovanni; Marcelli, Romolo; Margesin, Benno; Mezzanotte, Paolo; Di Nardo, Sergio; Russer, Peter; Sorrentino, Roberto; Vitulli, Francesco; Vietzorreck, Larissa
- Title:
- RF-MEMS SPDT Switch on Silicon Substrate for Space Applications
- Abstract:
- The paper illustrates the activity carried out under an ESA contract for the development of a miniaturized RF-MEMS SPDT switch and switch matrix using micromachining technology on a silicon substrate for power applications. A manufacturing procedure, based on an eight masks process, has been set up. At present, a broadband single-pole-double-throw (SPDT) switch operating in the 0-30 GHz frequency range has been fabricated and measured. Isolation of about -40 dB and insertion loss better than -0.... »
- Keywords:
- 0 to 30 GHz, broadband single-pole-double-throw switch, design process, fabrication process, micromachining, micromachining technology, microswitches, microwave switches, miniaturized switch, RF-MEMS SPDT switch, Si, silicon, silicon substrate, space applications, substrates, switch matrix
- Book / Congress title:
- Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems
- Publisher address:
- Atlanta, GA, USA
- Year:
- 2004
- Month:
- sep
- Pages:
- 151--154
- Fulltext / DOI:
- doi:10.1109/SMIC.2004.1398190
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