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Author(s):
Ulm, M.; Vietzorreck, Larissa; Reimann, M.; Walter, T.; Müller-Fiedler, R.; Kaspar, E.; Russer, Peter
Title:
Silicon-Based Millimeterwave MEMS Switches
Book / Congress title:
International Symposium on Signals, Systems, and Electronics (ISSSE)
Publisher address:
Tokyo, Japan
Year:
2001
Month:
jul
Pages:
110--113
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