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- Author(s):
- Vietzorreck, Larissa; Russer, Peter
- Title:
- Numerical Investigation of Micromachined Structures
- Book / Congress title:
- 1st VDE World Microtechnologies Congress (MICRO.tec)
- Publisher address:
- Hannover, Germany
- Year:
- 2000
- Month:
- sep
- Pages:
- 97--100
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