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- Document type:
- Konferenzbeitrag
- Author(s):
- Behlert, R.: Künzig, T.; Schrag, G.: Wachutka, G.
- Title:
- Theoretical and Experimental Investigations on Failure Mechanisms Occuring During Long-Term Cycling of Electrostatic Actuators
- Editor:
- IEEE
- Book / Congress title:
- 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
- Congress (additional information):
- EuroSimE 2014
- Date of congress:
- April, 7-9
- Year:
- 2014
- E-ISBN:
- 978-1-4799-4790-4
- Reviewed:
- ja
- Language:
- en
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